For questions please contact:
Heather KorffAVS
Events/Office Coordinator
Ph: 530-896-0477
E-mail: heather@avs.org
NCCAVS CMPUG Spring Meeting - April 13, 2017
Topic: Advances in CMP Consumables, Materials, and Tools
Symposium on Advances in CMP Consumables, Materials and Tools. The symposium will provide an international forum for academic researchers, industrial practitioners and engineers from around the world for the exchange of information on state-of-the-art research in CMP semiconductor technology. The CMPUG promotes the exchange of opportunities, ideas, friendly relationships and research collaboration. The areas of focus for this meeting will be the following:
- CMP consumables and materials
- CMP Polishing and Metrology Tools
- CMP Process Integration