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This is an online event.For questions please contact:
Heather KorffAVS
Events/Office Coordinator
Ph: 530-896-0477
E-mail: heather@avs.org
NCCAVS CMPUG Spring Meeting - April 22, 2021
Topic: Advances in CMP Consumables, Materials and Tools
THIS MEETING WILL BE HELD VIRTUALLY VIA ZOOM PLATFORM! (Meeting details are TBD and login details will be provided 1 day prior to the meeting date to those who are pre-registered. FREE - Advance Registration is Required!)
Symposium on Advances in CMP Consumables, Materials and Tools. The symposium will provide an international forum for academic researchers, industrial practitioners and engineers from around the world for the exchange of information on state-of-the-art research in CMP semiconductor technology. The CMPUG promotes the exchange of opportunities, ideas, friendly relationships and research collaboration. The areas of focus for this meeting will be the following:
- CMP consumables and materials
- CMP Polishing and Metrology Tools
- CMP Process Integration