Wednesday, May 25, 2022 at 9:00 AM EDT
Friday, May 27, 2022 at 4:30 PM EDT

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Georgia Institute of Technology Campus

Institute for Electronics and Nanotechnology

Marcus Nanotechnology Building

345 Ferst Drive

Atlanta, GA 30332

Driving Directions 

Agenda :

May the 25th

8:30AM - 9:00AM: Registration and Continental Breakfast  

9:00AM - 9:30AM: Course Introduction 

9:30AM - 10:00AM: Cleanroom Orientation 

 10:00AM - 10:10AM: Break

10:10AM - 11:45AM: Photolithography 

11:45AM - 1:00PM: Lunch

1:00PM - 4:30PM: Group Lab Session

May the 26th   

8:30AM - 9:40AM: Metal Lift-Off  

9:40AM - 10:40AM: PVD Deposition 

10:40AM - 10:50AM: Break 

10:50AM - 12:00PM: CVD Deposition 

12:00PM - 1:00PM: Lunch 

1:00PM - 2:00PM  Characterization & Testing

2:00PM - 4:30PM:  Group Lab Session

May the 27th

8:30AM -  9: 30AM: Oxidation & Diffusion 

9:30AM - 9:40AM: Break 

9:40AM - 10:40AM: Packaging

10:40AM - 10:50AM: Break  

10:50AM - 12:00PM: Wet Etching & Dry Etching

12:00PM - 1:00PM Lunch 

1:00PM - 1:20PM Workshop Conclusion

1:30 pm – 4:30 pm – Group Lab Session

Program Subject to Revision*


Dr. Hang Chen
Institute for Electronics and Nanotechnology
345 Ferst Drive

Atlanta, GA 30332


Spring 2022 IEN Microfabrication Short Course

 The Institute for Electronics and Nanotechnology (IEN) at Georgia Tech will offer a short course on microfabrication from May 25th - 27th, 2022. This
in­tensive three-day short course combines classroom lectures and laboratory based hands-on fabrication in the IEN cleanroom. The goal of the course is to impart a basic understanding of the science and technology of microfabrication processes as used in academia and industry.

This short course will cover essential microfabrication techniques including photolithography, thin film deposition, etching, packaging, and characterization. Attendees will gain valuable experience by fabricating simple devices in one of the most advanced uni­versity cleanrooms in North America.

Target Audience

Attendance is open to the general technical community and is not limited to current Georgia Tech students or IEN users. Anyone interested in cleanroom fabrication techniques is strongly encouraged to attend this course. The course is suitable for both new and experienced researchers interested in micro-fabrication techniques and applications.

A course emphasis will be placed on IEN cleanroom resources, however, the concepts and techniques discussed are applicable to a broad array of research in this field.



Rates: *Rates include lunches on all days*

Georgia Tech Rate: $200
Academic and Government Rate: $400
Industry Rate: $800


Due to the nature of the lab portion of the course, registration has a maximum of 20 participants. Your registration is not guaranteed until full payment is received. If you wish to charge the course to an IEN Cleanroom account, please contact us immediately so that we can provide the proper forms, and so that we may notify the PI or accounts representative. Credit cards are the only payment option for people outside Georgia Tech. Once you submit your registration, follow the appropriate links in your confirmation email. A waiting list of overflow registrants will be maintained in case of cancellations.

** Registration is NOT complete until you have received a link to pay for your attendance through Georgia Tech's secure payment gateway or you provide an internal billing account. If you are not using an internal account, you will receive a payment link via email after completing the initial registration process.

Registration and full payment MUST be completed online by May the 23rd at 4PM ET, 2022: NO EXCEPTIONS. No one will be allowed to register or pay on-site.** 



Getting to the workshop is easy if you stay at the Georgia Tech Conference Center

Georgia Tech Hotel (attached to Global Learning Center)
800 Spring St., Atlanta, GA 30308
404.838.2100 - Reservations
404.347.9440 - Hotel Main

Hotel reservation’s hours are Monday through Friday 8am-5:30pm; Saturday 9am-3pm

Directions and Parking:

Parking is not included in the cost of the course. If you are a visitor and you would like to park on campus you will need to use the pay-by-the hour visitor parking lot, located across from the Marcus Nanotechnology Building. We are also easily reached via public transportation and Georgia Tech transportation services. Information on these services, and directions to Georgia Tech and IEN, can be found here: http://www.ien.gatech.edu/contact/visit-ien-georgia-tech

Schedule Overview:

Day1: Registration, Introduction, Lectures, Group Lab Session (9:00 am - 4:30 pm)

Day2: Lectures (morning); Group Lab Session (afternoon) (9:00 am - 4:30 pm)

Day 3: Lectures (morning); Group Lab Session (afternoon) (9:000 am - 4:30 pm)

Dress Code: 

There is a mandatory dress code for access to the IEN clean room which must be adhered to. 

Shoes: Socks or stockings are required. Shoes must be closed-toe shoes that fully enclose the heel and the top of the foot. Additionally, the shoes must not have a high heel (over one inch) or a deep cleat that may hold mud or other dirt. Also, your shoes must be clean and dry when you enter the facility.
Not Allowed: Sandals, open weave shoes, or shoes that expose the top of the foot.    

Shirt: Your shirt must be at least a short sleeve shirt that is long enough to reach your pants (no bare midriffs) and it must not have a deep neckline.
Not Allowed: Tank tops, halter tops, and spaghetti strap tops.   

Pants: Pants must be full-length, from waist to ankle.
Not Allowed: Shorts or short pants, tight pants. NO skirts or dresses.